Figure 7
An example efficiency simulation of a multilayer blazed grating is presented as a function of cff at a single energy (E = 2840 eV). The solid line is a MLgrating simulation, while the dashed lines were found using software developed at Tongji University based on RETICOLO. The grating is a Cr/C multilayer on a silicon grating [see the corresponding schematic in Fig. 1(b)] with the following parameters: N = 1500 lines mm−1, B = 0.68°, A = 177.28°, m = −1, d = 5.87 nm, γ = 0.5 and num_periods = 40. The values of m_max and num_slices were 5 and 6, respectively. |