Figure 14
Sketch of the interferometric setup used for the stability and repeatability measures on the six-axis piezo positioners, with In the interferometric units, Mn the mirrors, Sn the motors and B the base. Two bars with mirrors at the end were affixed to the top and bottom of the positioner. The difference in position between the two mirrors at the ends of one bar gives the rotary angle, which controls the Bragg angle. |