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Figure 2
Design of the chips with a silicon nitride suspended membrane (not to scale). (a) Overview of the first chip design with the membrane placed diagonally with respect to the chip edges. (b) Overview of the second chip design, the membrane is orthogonal/parallel to the chip edges. (c) Detailed scheme of the platinum alignment marks (orange) and the silicon nitride membrane (purple). The dimensions of each parameter vary across designs and are detailed in Table 1[link]. (d) Schematic cross section of the silicon chip (not to scale) and (e) images of the front side (right) and back side (left) of the chip.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 31| Part 6| November 2024| Pages 1505-1513
https://doi.org/10.1107/S1600577524008865
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