Figure 1
Calculated results of wavefield propagation of ZPs using a modified BPM (Tong et al., 2022) for (a) the ZP template before ALD (HSQ-ZP), (b) the ZP after ALD of Pt (Pt-HSQ-ZP) and (c) the ZP integrated with a beamstop (30 µm diameter). The X-ray energy was 8 keV and the ZP resolution was 30 nm. The plots on the right show the light field intensity distribution extracted along the central optical axis. |