A study of structural effects on the focusing and imaging performance of hard X-rays with 20–30 nm zone plates

Tong, X.; Dhamgaye, V.; Chen, Q.; Wu, Q.; Deng, B.; Zhang, L.; Fox, O.; Wang, H.; Zhao, J.; Chen, Y.; Xu, Z.; Li, P.; Sawhney, K.

doi:10.1107/S1600577524009615

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Figure 3
SEM micrographs for the fabricated ZPs. (a) Overview of the HSQ-ZP template with a diameter of 300 µm, t = 1000 nm. (b, c) SEM images at a tilt of 45° of the HSQ-ZP. (d, e) SEM images at a tilt of 45° of the HSQ-ZP after ALD of Pt. The inserts show the top view of the outer zones using the same scale bar as the tilted images. (f) Cross-sectional SEM view of the Pt-HSQ-ZP on an Si wafer substrate, observed with a tilt angle of 5°.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 31| Part 6| November 2024| Pages 1457-1463

https://doi.org/10.1107/S1600577524009615

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