Figure 4
Focusing and imaging quality of the Pt-HSQ-ZPs measured using TXM. TXM images of a Siemens star test sample using the Pt-HSQ-ZPs with resolutions of (a) 30 nm and (b) 20 nm. The energy was 7.2 keV and the dwell time was 10 s. (c) SEM image of the Siemens star with a minimum resolution of 20 nm. Focusing performance characterization using X-ray ptychographic CDI and 2D intensity distribution for (d) 30 nm and (e) 20 nm Pt-HSQ-ZPs. |