A study of structural effects on the focusing and imaging performance of hard X-rays with 20–30 nm zone plates

Tong, X.; Dhamgaye, V.; Chen, Q.; Wu, Q.; Deng, B.; Zhang, L.; Fox, O.; Wang, H.; Zhao, J.; Chen, Y.; Xu, Z.; Li, P.; Sawhney, K.

doi:10.1107/S1600577524009615

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Figure 5
Comparison of focusing efficiencies between Pt-HSQ-ZPs without (ideal) and with (non-ideal) residual resist in the HSQ trenches, highlighting the effect on the lens efficiency. Both the 20 nm- and the 30 nm-resolution ZPs are included. The lens diameter was 300 µm and the zone height was 1000 nm.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 31| Part 6| November 2024| Pages 1457-1463

https://doi.org/10.1107/S1600577524009615

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