Figure 1
(a) Thickness homogeneity measurements along the sagittal direction of the W/Si DMM stripe for pre-deposition substrates (light blue circles) and final DMM stripes (dark blue triangles) at the BAMline. The lateral thickness was determined by X-ray reflectometry thickness measurements, carried out for a DMM test report by AXO Dresden GmbH. The specified optical aperture and homogeneity are marked with the green rectangle. (b) A simple model following the inhomogeneity measurements to explain the origin of the stripe pattern on an unnormalized image. The irregularities on the DMM surface introduce phase shifts which are then transformed to vertical intensity modulations on the detector. |