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Figure 11
(Top) Grazing-incidence total scattering patterns of a sample film on a substrate, the blank substrate and the difference from subtracting the scaled background from the sample data. The sample is a 30 nm HfO2 thin film deposited by sputtering at room temperature onto fused silica; the substrate is a blank piece of the same fused silica. The data were collected at P21.1 with a focused beam at an energy of 101 keV on the Pilatus3 X CdTe 2M detector positioned at about 300 mm downstream of the sample. (Bottom) PDF of the HfO2 thin film obtained by Fourier transformation of the film signal as the difference between the sample and the substrate from the top panel.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 32| Part 3| May 2025|
https://doi.org/10.1107/S1600577525002826
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