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Figure 8
Metrology of a separate lens unit located in the center of the micro-lens array. (a) Phase image, (b) 3D thickness profile and (c) measured thickness distribution compared with the ideal profile.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 32| Part 5| September 2025| Pages 1310-1318
https://doi.org/10.1107/S1600577525005521
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