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Figure 6
Impact of a 1.38 nm (RMS) thermal deformation on resolving power. The absorption power of the grating was 2.14 W @ 1240 eV. The simulation was conducted at a repetition rate of 100 kHz with an energy per pulse of 200 µJ. (a) Thermal deformation distribution and meridional height error of the grating. (b) Wavefront distortion occurs in the (y, t) domain before the slit. (c) The thermal deformation of the grating causes spectral broadening of the integrated spectrum obtained after the slit.

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