Fabrication and characterization of a full-size ultra-precise lamellar grating for the Cosmic beamline at ALS-U

Voronov, D.; Park, S.; Huang, L.; Islegen-Wojdyla, A.; Gullikson, E.; Padmore, H.; Wang, T.; Idir, M.

doi:10.1107/S1600577525005946

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Figure 6
Groove placement errors measured for the ±1st orders (red) and ±7th orders (blue) for the reference grating pattern (a). Groove density errors for the reference grating (b); the groove density errors caused by ±10% tolerance specified for the g₂ are shown with blue and red curves.

JOURNAL OF
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ISSN: 1600-5775

Volume 32| Part 5| September 2025| Pages 1194-1200

https://doi.org/10.1107/S1600577525005946

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