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Figure 7
Laminography TXM imaging of an integrated circuit: (a) integrated circuit fixed to a Kapton tape, (b) selection of a region of interest in the micro-resolution regime, (c) zooming to the region of interest by placing the TXM optics in, (d) projections after flat-field correction at 0 and 90° rotation.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 32| Part 6| November 2025| Pages 1452-1462
https://doi.org/10.1107/S1600577525007234
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