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Figure 8
Reconstruction of the integrated circuit sample: (a) 3D rendering of the reconstructed volume, (b) vertical slice through reconstruction with zooming in and marking positions of demonstrated horizontal slices, (c) horizontal slice through the reconstructed volume at layer L1, (d) horizontal slice through the reconstructed volume at layer L2 and zoomed-in regions. Red crosses indicate positions of the zoomed-in regions.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
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