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Figure 3
Measurement of beam spot sizes (Gaussian fitting of the first derivation) at horizontal (a) and vertical directions (b) at 244 eV, and at horizontal (d) and vertical directions (d) at 5000 eV. |
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Figure 3
Measurement of beam spot sizes (Gaussian fitting of the first derivation) at horizontal (a) and vertical directions (b) at 244 eV, and at horizontal (d) and vertical directions (d) at 5000 eV. |