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Figure 5
WG alignment in the KB beam. (a) Intensity distribution of the KB focal region, probed at E = 13.8 keV, by scanning WGx-Ru80-300 (d = 80 nm, L = 300 µm, Ru/B4C/Ru) through the focal region. This can be recorded for different angles of the KB mirrors to align the KB and to find the focal plane. (b) The final KB focal width is controlled by scanning a WGx through the focal plane, after identification of the focal plane along the optical axis. The integrated intensity profiles (Pilatus 300k detector) in the two orthogonal directions along with least-square fits, shown for WGx-CH (d = 80 nm, Mo/C/Mo) at E = 13.8 keV. Focal widths around FWHM = 300 nm are typical (independent of E). (c) Far-field intensity pattern of the KB, measured with attenuators. (d) Far-field intensity pattern of WGb-Ev3R3 channel #32 at E = 8 keV, recorded with the Eiger detector (linear color map, 0–2.8 × 104 photons). (e) Scan along the bond interface of WGb-Ev3R3 through the KB focus at 8 keV. The integrated intensity of the Pilatus 300k detector shows the maxima corresponding to channels #4–#32, consisting of broad channels for alignment (A), tapered channels (T1–T3) of different taper angles and straight channels (S) of different nominal width w = 100, 75, 50 nm.

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