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Figure 9
WG beam splitter and interferometer, which can be used to encode and measure the absolute phase of an object inserted in one of the two beams, and also serve off-axis holography or ptychography with highly diverse probes. (a) SEM image showing the region, where one channel splits into two (before wafer bonding). (b) Far-field pattern with double-slit-like interference for D = 5 µm. (c) Line-cut to assess the visibility of the interference pattern. Here, the two beams do not exhibit equal intensity, such that the destructive interference cannot reach zero. (d) Reconstruction of the near-field intensity in the WG exit plane, confirming the unequal intensity, and (e) corresponding SEM image of the WG exit showing the two channels. (f) The oscillation period of the interference pattern doubles for D = 10 µm.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 33| Part 2| March 2026| Pages 298-313
https://doi.org/10.1107/S1600577525011567
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