|
|
|
Figure 3
(a) Relative metrology manager GUI and reconstructed sample-induced phase. (b, c) Retrieved horizontal and vertical displacement fields. (d) Reconstructed 2D phase map. |
|
|
|
Figure 3
(a) Relative metrology manager GUI and reconstructed sample-induced phase. (b, c) Retrieved horizontal and vertical displacement fields. (d) Reconstructed 2D phase map. |