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Figure 7
(a) The synchrotron rocking curve in symmetrical 111 reflection using 1.1 Å radiation for silicon implanted with a dose of 1 × 1017 cm−2 of 1.5 MeV protons. (b) The theoretical rocking curve obtained by numerical integration of the Takagi–Taupin equations corresponding to (a). (c) The assumed strain profile equal to the vacancy distribution calculated using TRIM-95 used for computation of curve (b).

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 7| Part 5| September 2000| Pages 318-325
doi:10.1107/S0909049500009420
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