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Figure 5
Imaging at 1.5 keV. Bottom: overview STXM image of a Siemens star showing inner structures (100 nm pixel size, 10 ms dwell time). Top: high-resolution image of a portion of the two innermost rings with the zoomed area marked in the overview (20 nm pixel size, 15 ms dwell time). 60 nm structures (120 nm period) of the second ring were resolved.

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