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Figure 7
UV/VIS plasma emission spectra taken during an oxygen plasma cleaning run using the GV10x ICP RF gun with 50 W RF power in 20 minutes time intervals.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 21| Part 2| January 2014| Pages 300-314
doi:10.1107/S1600577513032402
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