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Figure 2
Laboratory characterization of the MLL microscope. (a) The MLL microscope inside a vacuum chamber during testing procedures; (c) resolution measurements, 0.5 nm steps performed with a sample stage, the red line showing interferometer readings, the black line representing the desired motion trajectory; (e) drift of the sample stage measured using interferometry in the open/closed loop mode of operation, interferometer readings are independent of motion controls system; (b), (d), (f) thermal profile measurements: (b) photograph of the vertical MLL assembly, (d) infrared image of the vertical MLL assembly, encoders are powered all the time, (f) vertical MLL assembly with duty-cycling mode enabled, thermal gradients diminished significantly.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
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