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Figure 2
Designed surface profiles (a) and the measured figure errors of (b) M1 and (c) M2 mirrors. The four different surfaces are shown color-coded and the combination in this experiment is shown by the solid lines. The abscissa indicates the longitudinal position from downstream to upstream of the BL29XUL beamline and is shifted by matching the center of the mirror with zero. The figure errors were estimated by profilometry stitching 0.1 mm-width center lines using a combination of Zygo GPI XP/D and NewView7300.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 23| Part 1| January 2016| Pages 158-162
doi:10.1107/S1600577515019797
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