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Figure 3
(a) Ta-fluorescence map of a NTT-AT resolution test pattern (dwell time 100 ms per pixel, 100 nm × 100 nm pixel size) and (b) the corresponding average power spectrum. A Kaiser–Bessel function was applied as a filter with β = 2. A resolution of 225 nm half-period structures was determined.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 23| Part 6| November 2016| Pages 1550-1560
https://doi.org/10.1107/S1600577516015289
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