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Figure 11
(a) X-ray micrograph of a Siemens star test pattern in Ni with 20 µm diameter and 60 spokes. The test pattern was imaged with an OZP, 110 µm in diameter and 50 nm outermost zone width. Smallest features of about 60 nm can be resolved (arrows). (b) X-ray micrograph of a zone plate in Au. The test pattern was imaged with a zone-doubled OZP, 100 µm in diameter and 15 nm outermost zone width. A photon energy of 720 eV and an acquisition time of 10 s were used for both. Smallest features of about 20 nm can be resolved (arrows).

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 23| Part 6| November 2016| Pages 1526-1537
https://doi.org/10.1107/S1600577516014405
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