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Figure 1
Types of shape error of grating (zone) structures: (a) ideal structure to realise a maximum diffraction efficiency, satisfying a = 0.5 and t = λ/(2δ), where a is the zone ratio defined as a = d1/(d1 + d2), d1 and d2 are the widths of the opaque and transmitting zones, respectively, t is the zone thickness, λ is the wavelength and δ is the decrement of the refraction index from unity; (b) zone ratio a ≠ 0.5, (c) zone thickness tλ/(2δ).

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