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Figure 4
(a) Fast Fourier transform (FFT) spectrum of the fully loaded sample stage in the x direction. All resonances are above 100 Hz. (b) SEM image of the Pt test pattern. Donuts are 80 nm in diameter and 20 nm line width. The height of the rings is 200 nm. (c) XRF image (platinum L-edge) of the same test pattern, with X-ray energy 12 keV, exposure time 0.2 s and 5 nm per pixel. A scan profile along the vertical line is shown on the left and demonstrates the achieved spatial resolution.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 24| Part 6| November 2017| Pages 1113-1119
https://doi.org/10.1107/S1600577517011183
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