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Figure 6
The final wavefront radius of curvature (a) of the designed deformation mirror measured from speckle scanning metrology after voltage compensation. (b) The applied voltages of 18 small actuators are calculated according to the radii of curvature of the deformation mirror which were measured by using speckle scanning metrology.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
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