research papers
Use of electron backscatter diffraction patterns to determine the
Part 2. Offset correctionsaFederal Institute for Materials Research and Testing (BAM), Unter den Eichen 87, 12205 Berlin, Germany, bInstitut für Mineralogie, TU Bergakademie Freiberg, Brennhausgasse 14, 09596 Freiberg, Germany, and cAcademic Centre for Materials and Nanotechnology, AGH University of Science and Technology, Mickiewicza 30, 30-059 Krakow, Poland
*Correspondence e-mail: gert.nolze@bam.de
A band width determination using the first derivative of the band profile systematically underestimates the true Δa/a of the mean lattice parameters derived from as many Kikuchi band widths as possible. For dynamically simulated Kikuchi patterns, Δa/a can reach up to 8% for phases with a high mean Z, whereas for much more common low-Z materials the offset decreases linearly. A predicted offset Δa/a = f(Z) is therefore proposed, which also includes the unit-cell volume and thus takes into account the packing density of the scatterers in the material. Since Z is not always available for unknown phases, its substitution by Zmax, i.e. the of the heaviest element in the compound, is still acceptable for an approximate correction. For simulated Kikuchi patterns the offset-corrected lattice parameter deviation is Δa/a < 1.5%. The lattice parameter ratios, and the angles α, β and γ between the basis vectors, are not affected at all.
Corrections are proposed to compensate for the resulting offsetKeywords: mean atomic number; Kikuchi patterns; lattice parameters; automated Bragg angle determination; lattice parameter determination; dynamical theory of electron diffraction; electron backscatter diffraction; Funk transform.
1. Introduction
Our systematic investigation of physics-based simulated backscattered Kikuchi diffraction (BKD) patterns in Part I of this series (Nolze et al., 2023) showed that the in the edge profile of a Kikuchi band is fairly indeterminate. As an alternative, the band width Whkl = (θmin − θmax) as the distance between the (global) extreme positions of the first derivative is proposed as a rough estimate of the double 2θhkl. Although the first derivative works automatically and gives reproducible results, it yields slightly different lattice parameters ahkl from Kikuchi band widths indicating the (inverse) distance to the reciprocal-lattice point hkl. The resulting distribution of ahkl as calculated using the software CALM (Nolze et al., 2021) is described by a mean aCALM and a standard deviation σhkl.
Since for simulated patterns the true lattice parameters are known, the offset Δa/a = (aCALM − a0)/a0 can easily be displayed as a function of the mean of the respective phase. For simulated patterns, the offset is always positive (0 < Δa/a < 8%). To a first approximation it scales with or the backscatter coefficient η that can be derived from it, just as in the study of numerous experimental Kikuchi patterns by Nolze et al. (2021). The lattice parameter offset determined on experimental BKD patterns appears to be shifted by only −4%, such that −4 < Δa/a < 4%.
The true reasons for this offset shift are currently unknown. They could be the result of imperfect input values during simulation of the Kikuchi patterns, or arise from systematic errors made in experimental patterns and an incorrectly determined projection centre (PC) or from excess deficiency effects. It is also conceivable that the differences are due to a deviating electron energy, e.g. if the effective landing energy is lower than the accelerating voltage. The resulting higher electron wavelength λe would suggest a shorter translation periodicity of the lattice. Since a, b, c ∝ 1/θhkl ∝ 1/λe ∝ , for E0 = 20 kV the effective electron energy would have to be about 1.5 keV lower to account for the offset shift of Δa/a ≃ 4%.
On the other hand, it is known that not E0 but rather an energy distribution is likely to be relevant for experimental BKD patterns, whose governing maximum is slightly below E0 (Wells, 1974; Reimer, 1998; Goldstein et al., 2018). Winkelmann et al. (2019) showed that for Si the mean energy is estimated to be 1–1.5 keV below the discussed E0 = 15 keV. This agrees surprisingly well with the shift observed here, though this effect is predicted to be progressively smaller for higher- materials. Winkelmann et al. (2019) dealt mainly with the change in the effective electron energy as a function of the scattering angle, which is not considered at all in BKD pattern simulations.
2. Offset corrections
If we assume that the offset curve of the simulated BKD patterns also explains that of the experimental patterns to a first approximation, the goal is to predict the offset based on the chemical composition of the phase, for example, and thus be able to correct aCALM.
2.1. Elements
For simplicity, the elements are analysed first and then compounds, since for the former holds.
In Fig. 1(a) the relative offset Δa/a is shown as hollow symbols for as many elements as possible of different structure types; for some elements more than a single modification was analysed, e.g. for Fe all three are shown. The light-grey error bars refer to σhkl which also increases with Z. The distribution of hollow symbols can be roughly described by a linear approach,
plotted in Fig. 1(a) as a dark-grey line. However, clearly visible hump-shaped deviations from this line occur for elements with Z = 25–30, Z = 40–50 and Z = 70–80.
The positions of these humps are reminiscent of the ρ, shown for comparison in Fig. 1(b) as blue filled circles. The undulating curve is due to the varying binding forces and the resulting similarly varying packing density of the atoms, which can be described in a similar way to the Therefore, for a better description of the offset curve, the is taken into account, which is as much of an unknown for an unknown phase as the lattice parameters to be determined. However, aCALM and the unit-cell volume Vuc derived from it are completely sufficient for a suitable estimate.
The ρ is the quotient of the mass muc and volume Vuc of the muc is equivalent to the number of formula units (n) per multiplied by the M. Since for elements M ≃ 2Z we can formulate a relationship between density ρ and Z,
(n/Vuc)Z represents the proton density, which is assumed to be crucial for backscattering since the interaction happens between the and the core of the atom. If there is an anomaly in the proton density, a deviation from the linear lattice parameter offset follows.
Fig. 1(b) proves that, apart from a proportionality factor of 1.25, the density ρ (light-blue circles) for elements is almost congruent with 3.321nZ/Vuc (red filled circles). [The factor 3.321 results from 2 ( ≃ M/Z) divided by Avogadro's number 6.02214076 × 1023 and multiplied by cm3/Å3 = 1024.]
Accepting the similarity of the hump positions as a sufficient argument for correlation, the offset shown in Fig. 1(a) can be satisfactorily predicted by a quadratic equation with nZ/Vuc as an additional correction term in (1),
For elements, the factors p, q and r in equation (3) are refined by a least-squares approach to give p = 0.098, q = 0.064 and r = 0.525, which leads to the distribution of black dots shown in Fig. 1(a). By inserting Z and Vuc into (3) the offset can be corrected.
2.2. Compounds
If the same correlation between lattice parameter offset and is assumed for compounds, the main challenge is the estimation of the mean
.has been described in the past only in purely empirical terms. A few approaches (I–III) are discussed, for example, by Joy (1995), Reimer (1998) and Howell et al. (1998) and use either the ci or the atomic fraction ai:
They not only change the wanted (vertical) offset for the phase but also shift the respective point horizontally according to the estimates proposed in (4).
To start with the simplest possible phases, the master patterns of 96 binary phases of type AB were simulated and analysed. Among these, there were 43 with structure type B1 (NaCl), 12 with B2 (CsCl), 16 with B3 (zincblende) and eight with B4 (wurtzite). Compounds of light, heavy, or both light and heavy elements were selected since we expected the largest deviation in the fit for such phases.
In addition, BKD patterns were analysed for a further 136 common phases that consist of up to five elements and are of greater technical or mineralogical interest, such as borides, carbides, oxides,
carbonates, sulfates, silicates and various intermetallic phases.Direct comparisons of the models in (4) show that the smallest discrepancies between the lattice parameter offset from CALM and a fit using the quadratic correction in (3) accumulate from approach I: . The best match between the offset result using CALM and that predicted using and Vuc is obtained when the following constants are used in (3): p = 0.133, q = 0.064 and r = 0.686. In Fig. 2, the predicted offsets are again represented by black dots overlaying the Δa/a derived using CALM (hollow circles). The different colours of the circles distinguish between the different structure types. For a better comparison with Fig. 1 the linear fit of (1) is drawn again as a dark-grey straight line.
Fig. 2 suggests that the quadratic term in equation (3) is not as important for compounds as for elements. The offset of the compounds scatters apparently randomly around the grey line and results in Δa/a = ±1%. The distribution of the filled circles confirms that for many phases the difference between linear and quadratic fits is small. Nevertheless, especially for > 60, considerable offsets appear which are well predicted. On the other hand, the majority of binary phases with = 70 ± 3 show a lower offset than predicted by the linear or quadratic fits. In addition, the number of compounds is higher than that of elemental structures. The symbols of many phases in Fig. 2 inevitably overlap or obscure each other, i.e. one really only sees the outliers. Comparing the frequency distributions of the relative deviations of the predicted offset (fit) and the offset from CALM for elements and compounds, it turns out that they are quite similar (Fig. 3). They all look similar to a normal distribution. The minimal shift of the maxima of ∼0.1% indicates a slight overestimation of the offset by the applied fit. However, compared with the FWHM of the distribution of ∼0.6% this is negligible.
The difference between the offset determined by CALM and the offset predicted for correction should also be related to the uncertainty σhkl in the band width determination, and it characterizes the quality of aCALM. The frequency distributions of |afit − aCALM|/aCALM and of σhkl/aCALM in Fig. 4 show that the standard deviation σhkl on aCALM is considerably higher than imperfect corrections from the fit. This can also be seen in Fig. 2 when looking at the error bars, which are significantly longer than the deviation of the fitted black points from the corresponding hollow circles.
Considering the larger uncertainty of σhkl in Fig. 4, the linear approach of equation (1) shown in Fig. 1 could also be used as-is for a simple correction on aCALM. This simplifies the fitting considerably because one does not need to know n, the number of formula units in the Vuc, on the other hand, is no problem because, although uncorrected, it is determined sufficiently accurately by CALM. However, a remaining problem is that even then the chemical composition of the unknown phase must be known as accurately as possible in order to obtain a reliable .
2.2.1. Estimation of n
The quadratic correction term in (3) contains n, the number of formula units distributed in the in addition to the unit-cell volume Vuc. For the 249 phases analysed, n was of course known. However, this is not the case for an unknown phase.
From equation (3) it follows that Δa/a increases with n. In Fig. 5 five phases with different n have been chosen as examples. n is given as a number in parentheses after each phase in the legend, and is shown in Fig. 5 for four of the five phases as black filled symbols; the exception is Cu3Au, where n = 16 is far outside the displayed range.
Since according to (3) the difference between offsets for different n is given by
the absolute level at n = 1 and the curvatures in Fig. 5 depend on the phase-specific ratio . The curvature increases the higher and the lower Vuc. A small Vuc can only be associated with a small n. On the other hand, and as Fig. 5 shows, for compounds with higher n the curvature decreases successively for wrong n and has less and less influence on Δa/a. Thus, it seems reasonable to assume n = 1 for an unknown phase as a first approximation. The resulting deviations between the true n and n = 1 for all investigated compounds are shown graphically in Fig. 6 for all analysed phases. Of the 249 compounds considered, 36 have n = 1 and mainly represent the first bar in the inset histogram in Fig. 6. Nearly half the compounds have an offset deviation <0.075%, independent of their true n. We conclude that, for unknown phases, the use of n = 1 nevertheless leads to acceptable offset corrections. Larger deviations are apparently only to be expected for phases with > 60 (Fig. 6).
The least-squares optimized parameters for offset prediction with n = 1 and in equation (3) are p = 0.113, q = 0.069 and r = 0.621.
2.2.2. The use of Zmax
The determination of the chemical composition of unknown crystalline phases in a matrix becomes increasingly uncertain, especially in the case of very small inclusions or precipitates, when it cannot be ruled out that a considerable part of the chemical signal used for the determination comes in fact from the surrounding matrix.
However, there is possibly another relationship inherent in . In approach I in (4) the
is multiplied by Zi so that
The weighting of heavy elements in the estimation of in compounds is clearly higher than that of light elements.
The analysis of all studied compounds showed that the element with the highest Zmax can substitute to a good approximation (Fig. 7): the comparison of and Zmax shows an almost proportional relationship (dotted line).
Replacing by Zmax and assuming n = 1, the following parameter set can be fitted: p = 0.117, q = 0.055 and r = 0.526. The diagram in Fig. 8(a) displays the predicted offset (black dots) but this time plotted as function of Zmax. Since , relative to their position in Fig. 2 all hollow circles representing the lattice parameter offset derived in CALM are shifted to the right, which results in a lower linear slope of the distribution (light-grey dotted line). The remaining offset difference Δfit−CALM between the offset predicted with Z = Zmax and n = 1 and the one resulting from CALM is shown in Fig. 8(b). Although the deviation is about one-third larger than in Fig. 2 for the true and n, it is still often less than 1%, which in our view represents a real alternative for phases whose chemical composition is not well known except for the heaviest element of the compound.
Thus, the resulting correction of the absolute lattice parameters by the predicted offset via Zmax will not be as good as for a phase with known composition, but we expect that the supposed error increases only for phases with heavy elements and amounts to a maximum of 2% [Fig. 8(b)].
3. Conclusions
For simulated Kikuchi patterns aCALM is systematically too high. The offset approximately correlates with of the phase. However, the use of Zmax and n = 1 is, to a first approximation, also an acceptable approach to estimate the offset Δa/a,
This enables the derivation of a corrected lattice parameter,
The deviation on the lattice parameter a0 used during signal simulation of the master pattern is presented in Fig. 9.
Higher Zmax tend to generate higher deviations. For the 249 compounds studied, the relative deviation is given by
and is therefore clearly smaller than the 10% estimated by Dingley & Wright (2009). However, these uncertainty limits are only valid for simulated patterns. For experimental patterns additional errors like trace position, projection centre and wavelength distribution will affect the result in such a way that the error will increase.
Since all other lattice parameters, i.e. a/b, c/b, α, β and γ, remain unchanged, the missing basis vector lengths can be determined:
Acknowledgements
We thank Romeo Saliwan Neumann for numerous experimental EBSD patterns. Open access funding enabled and organized by Projekt DEAL.
References
Dingley, D. J. & Wright, S. I. (2009). J. Appl. Cryst. 42, 234–241. Web of Science CrossRef CAS IUCr Journals Google Scholar
Goldstein, J. I., Newbury, D. E., Michael, J. R., Ritchie, N. W. M., Scott, J. H. J. & Joy, D. C. (2018). Scanning Electron Microscopy and X-ray Microanalysis, 4th ed. New York: Springer Science + Media. Google Scholar
Howell, P., Davy, K. & Boyde, A. (1998). Scanning, 20, 35–40. CrossRef CAS Google Scholar
Joy, D. C. (1995). Monte Carlo Modeling for Electron Microscopy and Microanalysis. Oxford University Press. Google Scholar
Nolze, G., Tokarski, T. & Rychłowski, Ł. (2023). J. Appl. Cryst. 56, 349–360. CrossRef IUCr Journals Google Scholar
Nolze, G., Winkelmann, A., Cios, G. & Tokarski, T. (2021). Mater. Charact. 175, 111040. Web of Science CrossRef Google Scholar
Reimer, L. (1998). Scanning Electron Microscopy: Physics of Image Formation and Microanalysis, 2nd ed. Berlin: Springer-Verlag. Google Scholar
Wells, O. C. (1974). Scanning Electron Microscopy. New York: McGraw-Hill. Google Scholar
Winkelmann, A., Britton, T. B. & Nolze, G. (2019). Phys. Rev. B, 99, 064115. Web of Science CrossRef Google Scholar
This is an open-access article distributed under the terms of the Creative Commons Attribution (CC-BY) Licence, which permits unrestricted use, distribution, and reproduction in any medium, provided the original authors and source are cited.