Characterization of polycapillary X-ray lens for application in confocal three-dimensional energy-dispersive micro X-ray diffraction experiments

Sun, T.; Zhang, M.; Ding, X.; Liu, Z.; Lin, X.; Liu, H.

doi:10.1107/S0021889807048285

Characterization of polycapillary X-ray lens for application in confocal three-dimensional energy-dispersive micro X-ray diffraction experiments

T. Sun, M. Zhang, X. Ding, Z. Liu, X. Lin and H. Liu

A confocal technology based on polycapillary X-ray optics is proposed to perform three-dimensional energy-dispersive micro X-ray diffraction. A three-dimensional energy-dispersive micro X-ray diffractometer based on a polycapillary focusing X-ray lens (PFXRL) in the excitation channel and a polycapillary parallel X-ray lens (PPXRL) in the detection channel has been designed. At $2\theta = 90^ \circ$ , the lateral resolution $l_X \times l_Y$ of this diffractometer is 49.7 $\times$ 49.9 $\rm \micro m$ at 7.5 keV, and its depth resolution

is 48.1 $\rm \micro m$ at 8.0 keV. The total resolution of this diffractometer in $\Delta d/d$ is 6.5% at 6.4 keV and $2\theta = 140.2^ \circ$ .

Keywords: polycapillary X-ray optics; three-dimensional energy-dispersive micro X-ray diffraction.

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Characterization of polycapillary X-ray lens for application in confocal three-dimensional energy-dispersive micro X-ray diffraction experiments

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