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The fluorescence EXAFS spectra for a copper thin film with a thickness of 3000Å measured at 300K, 350K and 400K were analyzed by the regularization method to directly obtain the radial distribution. The pair distribution was almost symmetric for 300K but asymmetric for 350K and 400K. This indicates that the atoms in copper vibrate anharmonically near room temperatures. The anharmonicity and the skewness of the asymmetric distribu-tion increases as temperature increases.

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