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Figure 1
Piezo scanner in the FMX endstation. (a) Schematic of the system we developed. Xf, Yf and Zf are the fine-scanning directions with a 200 µm travel range in each direction. Yc and Zc are the coarse motion directions. Ω is the rotation around the X-axis. GMX, GMY and GMZ are the motion directions of the XYZ stage assembly. (b) Schematic of the piezo scanner. P1, P2 and P3 are the motion directions of three shear piezo actuators of the NanoCube scanner. Yc and Zc are the motions of the NEXLINE coarse stages. Both fine and coarse stages are mounted on top of an air-bearing rotational stage, Ω. (c) Photograph of the system we developed installed at the FMX endstation, key components are enumerated: (1) cryogenic sample loaded on a SPINE cap, (2) piezo scanner, (3) microscope, (4) collimator, (5) beam stopper, (6) Nelson Air rotary stage. (d) Resonance frequencies of the piezo scanning system we developed.

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