Figure 6
Calculated beam profiles at the sample including slope errors on all optical components. The spot size and position are preserved within 30 eV when the exit slit is fixed. Beam profile for (a) 500 eV and (b) 530 eV (exit slit: 23 µm fixed at the 530 eV location; entrance slit: 27 µm). The spot size remains at 9 µm × 9 µm FWHM. Likewise, for a photon energy of (c) 770 eV and (d) 800 eV (exit slit: 23 µm fixed at 800 eV; entrance slit: 27 µm), a spot size of 8 µm × 8 µm FWHM is preserved. |