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Figure 7
Final focus measured using a YAG crystal. The total field of view shown is 40 µm × 40 µm. The exit-slit size was 25 µm for all images and the exit-slit position was fixed at 530 eV and 800 eV. |
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Figure 7
Final focus measured using a YAG crystal. The total field of view shown is 40 µm × 40 µm. The exit-slit size was 25 µm for all images and the exit-slit position was fixed at 530 eV and 800 eV. |