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Figure 1
Calculated beam profiles near the focus. Intensity profiles at (a) the defocus position Δz = 1.6 µm with the perpendicularity errors of Δχ = ±20 µrad and 0 µrad, and (b) focus with the incident angle errors of Δθ = ±1.5 µrad and 0 µrad. Intensity profiles at Δz = ±3 µm and 0 µm (c) with astigmatism Δd = 6 µm and (d) without astigmatism. Scale bar: 50 nm.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 27| Part 4| July 2020| Pages 883-889
https://doi.org/10.1107/S1600577520006980
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