Figure 6
Analysis results of experimental speckle patterns. Each point consists of three to ten images on average, and the error bar represents the standard deviation. (a) Azimuthal angle of speckle versus perpendicularity error Δχ. The image on the right represents the corresponding speckle pattern obtained at the error of 35 µrad (FWHM of the average speckle of 0.3 nm−1 × 0.12 nm−1). Scale bar: 0.06 nm−1. (b) Speckle size versus incident angle error Δθ in the vertical and horizontal directions. (c) Speckle size in the vertical and horizontal directions under astigmatism Δd versus sample position along the optical axis. The image on the right represents the speckle pattern obtained at the relative distance of 16 µm (FWHM of the average speckle of 0.3 nm−1 × 0.12 nm−1). Scale bar: 0.06 nm−1. |