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Figure 3
Actual positions (black) and travel-distance deviations (red) along the (a) X axis, (b) Y axis and (c) Z axis as a function of the nominal position. The deviation is the difference between the actual position read by the encoder and the nominal position estimated based on the pulse number of the stepping motors. The actual positions are measured in the range from −10 to +10 mm at nominal intervals of 0.1 mm. The figures (d), (e) and (f) are the same as (a), (b) and (c), respectively; however, the measurements are made at the nominal interval of the motor traveling resolution (2 nm and 4 nm for the X/Y and Z axes, respectively). The actual position is the average of the integrated values obtained by measuring the encoder position 1000 times.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 27| Part 4| July 2020| Pages 923-933
https://doi.org/10.1107/S1600577520006712
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