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Figure 3
Calculated results of (a) the groove density at different locations of the grating and (b) the aberrations F20, F30 and F40 versus photon energy varying from 100 to 1000 eV. |
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Figure 3
Calculated results of (a) the groove density at different locations of the grating and (b) the aberrations F20, F30 and F40 versus photon energy varying from 100 to 1000 eV. |