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Figure 7
The first-order diffraction efficiency of the grating versus photon energy. (a) Diffraction efficiencies at different groove ratios of 0.65 or 0.81; (b) Diffraction efficiencies at different groove depths from 4 to 8 nm. |
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Figure 7
The first-order diffraction efficiency of the grating versus photon energy. (a) Diffraction efficiencies at different groove ratios of 0.65 or 0.81; (b) Diffraction efficiencies at different groove depths from 4 to 8 nm. |