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Figure 1
Technical drawing of the environmental chamber. 1: vacuum cross; 2–6: different ports; 7: bottom; 8/9: lid; 10: dome; 11: heater/cooler with inner heat shield; 12: outer heat shield; 13: xyz piezo stage. |
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Figure 1
Technical drawing of the environmental chamber. 1: vacuum cross; 2–6: different ports; 7: bottom; 8/9: lid; 10: dome; 11: heater/cooler with inner heat shield; 12: outer heat shield; 13: xyz piezo stage. |