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Figure 1
The correcting phase plate and its design. (a) The phase shift was quantified for the 136 CRLs on the P06 beamline by means of ptychography. (b) The corresponding cross section of a 3D model of the phase plate providing appropriate aberration corrections for this specific CRL stack. (c) An SEM image of the phase plate produced on a silicon nitride substrate.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 29| Part 3| May 2022| Pages 654-663
https://doi.org/10.1107/S1600577522002582
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