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Figure 9
Zernike circle polynomial decomposition of the error profiles in Fig. 8[link]. The terms Z1 to Z4 are suppressed as they account for piston, x and y tilts, and defocus, respectively, and are not strictly optical aberrations. The terms Z5 and Z6 represent astigmatism, Z7 and Z8 show coma, and Z9 and Z10 show tetrafoil aberrations. Z11 stands for spherical aberration. Z12 onward are higher-order variations of the aberration terms from Z5 and Z11. The orange bars are rotationally symmetric indicating primary to tertiary spherical aberrations.

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