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Figure 5
The intensity distribution at the focal plane for the one-dimensional short kinoform lens calculated from the LWF model (black line) and BPM model (red line). The spot size r.m.s. is 30.0 nm. |
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Figure 5
The intensity distribution at the focal plane for the one-dimensional short kinoform lens calculated from the LWF model (black line) and BPM model (red line). The spot size r.m.s. is 30.0 nm. |