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Figure 7
Line error distribution over the central 80 mm of the HEG. The curve represents the distribution for the 62 nm r.m.s. placing error used to simulate the blue curve in Fig. 9 ![]() |
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Figure 7
Line error distribution over the central 80 mm of the HEG. The curve represents the distribution for the 62 nm r.m.s. placing error used to simulate the blue curve in Fig. 9 ![]() |