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Figure 1
The height errors in (a) and (c) are generated using equation (1)[link] with (fx, fy) = (150, 0) mm−1 and (fx, fy) = (10, 0) mm−1, respectively. Although they have the same height error of 50 nm RMS, the corresponding slope errors shown in (b) and (d) are very different from each other.

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