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Figure 2
(a) Sample positioning stage. Motor x and motor z control the movement of the sample, the rotation motor controls the rotation of the sample, and motor μ and motor ν control the tilt of the rotation axis. (b) Rotary-axis tilt model. The tilt angle of the axis of rotation can be split into the superposition of two orthogonal vectors. (c) Physical model of the rotary axis coarse alignment. The adjustment angle of the axis of rotation is roughly calculated from the coordinates of the four feature points.

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