Figure 12
We measured the height error of the mirror after (a) assembly with the manifold and without a metrology window, (b) installation of a 9.4 mm-thick λ/4 window, (c) pumping down the vacuum chamber to 10−8 Torr, (d) cooling the mirror to 87 K, (e) switching the metrology window to a 25.4 mm-thick λ/20 window, (f) pumping down the vacuum chamber to 10−8 Torr, (g) cooling the mirror to 98.75 K. Note that the measurements shown in (a) and (e) were made with a thermocouple clamped to the mirror substrate; the clamp is visible as a vertical band. Note also that the measurements shown in (f) and (g) include a reference mirror to separate window effects from mirror height error. |