|
|
|
Figure 3
Top: diagram of the cross section of the sc-diamond XBPM. Bottom: diagram of the cross section of the 4H-SiC XBPM, showing the layers of doped 4H-SiC and the thinner central region. (These diagrams are not to scale.) |
Open
access
access
journal menu![[Figure 3]](gy5048fig3.jpg)



