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Figure 12
The total deformation of the copper slit part and diamond slit blade. (a) In the original design the maximum total deformation is 1.47 × 10−3 mm and the deformation in the region of the diamond blade edge is 1.16 × 10−3 mm and (b) in the silicon-nitride-base design the maximum total deformation is 1.65 × 10−3 mm and the deformation in the region of the diamond blade edge is 6.63 × 10−4 mm. |
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