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Figure 2
(a) Diffraction pattern without the sample, showing overall (left) and an enlarged view (right) of the low-spatial frequency region. (b) Diffraction patterns of the 200 nm-thick test chart, showing overall (left) and an enlarged view (right) of the low-spatial frequency region. (c) One-dimensional intensity distribution of the diffraction patterns shown in (a) and (b) along the qx direction at qz = 0. |
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